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Micromachining Workstation

Fully-integrated system including:
● Field-proven laser source technology (Model CPA-Series)
● Multi-axis positioning system
● Beam delivery system
● Selection of processing parameters
● Class I enclosure
● Integrated, intelligent, on axis machine vision and inspection system
● Motion control
● Pulses “on-demand” (1, 2, … 64,000 at user- selectable repetition rate)a
● Optional Digital and/or Analog IO
● Complete computer control
● Granite base mounted on pneumatic
● vibration isolators
● Small footprint
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MICROMACHINING WORKSTATION

  • Positioning System - X,Y Axis:

     Max Travel  300 mm
     Repeatability  0.5 μm
     Accuracy  1.0 μm
     Orthogonality  5 arc sec
     Max. Velocity  5 cm/sec

    Positioning System - Z Axis:

     Max Travel  100 mm
     Repeatability  1.0 μm
     Accuracy  +/- 1 μm
     Max. Velocity  5 cm/sec

    Vision System:

     Zoom Lens  12x
     Resolution*  1 μm
     Field of View*  4 mm
     Lighting  LED Ring and Coaxial Light
     Inspection System  Pattern recognition, edge location, part rotation, part measurement.

     

  • a. TTL-0,+1 ΔT = 1/repetition rate
    1. Values are for the base system. Other configurations are available upon request.
    2. Resolution is for maximum magnification and depends on focusing objective, FOV is for minimum magnification.

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Micromachining Workstation 产品型录
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