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[產品資訊] XUV Transmission Grating
2021 年 7 月 29 日
產品資訊
Compact design and straight forward alignment.
Ideal for HHG (high harmonic generation) spectroscopies.
♦ Features
The low side wall roughness and well-controlled sharp pattern produces ideal XUV diffractions.
Broad bandwidth coverage.
Customized designs.
♦ Performance
♦ Variable parameters
Ta/SiN type
SiN type
Grating area
2 x 2 mm
Grooves
100 – 1200 lines / mm
Support bar
500 nm width, 50 μm pitch
Material
Ta (100 nm) and SiN (100nm)
SiN (100 nm)
Flame
10 x 10 x 0.625 mm Si
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