[產品資訊] EUV mirrors/X-ray mirrors
Custom designable XUV, EUV, and X-ray mirrors, only NTT-AT in the world
♦ Benefits
NTT-AT has been supplying high-quality XUV, EUV, and X-ray mirrors for more than 20 years. In particular, backed by its extensive experience and outstanding skills, it provides custom-designable multi-layer film mirrors adapted to meet individual customer requirements.
Since the 1990s, NTT-AT has developed and sold extreme ultraviolet (XUV or EUV) multi-layer mirrors and X-ray mirrors. The design of these mirrors reflects the feedback received from university, research institute, and enterprise customers in Asia, North America, South America, and Europe. Our vast reservoir of accumulated know-how and reliable technologies are what support the production of your multi-layer mirror.
♦ Features
Research institutes around the world have continued to choose NTT-AT’s multi-layer mirrors because of their quality. Multi-layer materials and structure are customized to meet your detailed specifications, such as substrate, peak wavelength, bandwidth, and dispersion. High heat-durability multi-layer mirrors are also supported. A reflectivity evaluation service using synchrotron facilities is also available as an option.
| Application example | Coating materials | Typical wavelength | ||
|---|---|---|---|---|
| XUV (EUV) mirror | EUV lithographyHigh-order harmonics applications Attosecond science X-ray laser | Multi-layer mirror | Mo/Si Ru/Si Zr/Al SiC/Mg Cr/C | 50 eV ~100 eV 50 eV~100 eV 50 eV ~ 70 eV 25 eV ~50 eV ~300 eV |
| Single layer mirror | SiC Pt Ru | 10 eV ~ 100 eV | ||
| X-ray mirror | Synchrotron applications XFEL applications Built into X-ray non-destructive inspection devices | Multi-layer mirror | W/C W/B4C Ru/C Pt/C | 1 keV ~ 30 keV |
| Single layer mirror | C B4C SiC Cr Ni | 1 keV ~ 30 keV |
♦ XUV multi-layer mirrors（EUV multi-layer mirrors）
Substrate shape: plane, convex, concave, paraboloid, Toroidal surface, ellipsoid
Substrate materials: Quartz, Silicon, Zerodewer, etc.
Coating materials:：Mo/Si, Ru/Si, Zr/Al, SiC/Mg, Cr/C etc.
Substrate size ：φ3 mm～φ300 mm
NTT-AT will provide high-durability XUV multi-layer mirrors, highly heat-resistant XUV multi-layer film mirrors as well as optical systems, such as Schwarzschild optical systems and pump probe optical systems.
Φ10mm plane mirror
Measured reflectivities of Mo/Si multi-layers
(normal incident angle: 2 degrees)
Multi-layer mirror for pump probe test
EUV broadband ellipsoidal mirror
(Φ100 mm Zerodewer)
Measured relectivities of broadband mirrors, narrow band mirror(wavelength :30 nm)
Mo/Si multi-layer mirrors have a high reflectivity near the wavelength of 13 nm (90 eV). NTT-AT’s Mo/Si multi-layer mirrors have a reflectivity of up to 70% for normal incidence.
The materials, film structure, and substrate shape of NTT-AT’s XUV mirrors can be customized to suit your needs regarding central wavelength and optical arrangements.
♦ X-ray multi-layer mirrors
Substrate figure: plane, ellipsoid, paraboloid, cylindrical surface, toroidal surface
Substrate: Quartz, Silicon, Zerodewer, etc.
Coating materials: W/B4C, W/C, Pt/C etc.
Substrate size: Max 500 mm
NTT-AT provides K-B mirror system, Walter mirror etc.
Product example
Multi-layer mirror for K-B mirror system
W/B4C multi-layer and W/C multi-layer film mirrors have high reflectivity for hard X-ray applications. To reflect and concentrate a hard X-ray efficiently, it is necessary to minimize the oblique angle of incidence. This requires a long mirror length and a small multi-layer film cycle length.
Evaluated reflectivity (wavelength: 0.154 nm, Blue: measured reflectivity, Pink: calculated reflectivity, periodic length: 2.95 nm)
The materials, film structure, and substrate shape of NTT-AT’s X-ray mirrors can be customized to suit your needs regarding central wavelength, bandwidth and optical arrangements.
♦ Single layer mirrors
Substrate figure: plane ,ellipsoid ,Paraboloid ,cylindrical surface ,toroidal surface
Substrate materials: Quartz, Silicon, Zerodewer, etc.
Coating materials: C, B4C, SiC, Ru, NbN, Pt, etc.
Substrate size: Max 500 mm
NTT-AT provides K-B mirror system, Walter mirror, etc
Ellipsoidal mirror with Ru layer
Single layer mirrors, which use total reflection, are used for beam steering, light concentration and removal of unneeded wavelengths in the XUV to X-ray range.
The materials and substrate shape of NTT-AT’s single layer mirrors can be customized to suit your needs regarding central wavelength and optical arrangements.