[技術分享] 3D surface topography measurements
Easy to integrate surface topography measurement
Measuring surface properties is a way to control and adjust manufacturing methods in order to improve the sample overall performance. For this type of application, Phasics SID4 quantitative phase imaging cameras are integrated on commercial or homemade optical microscope setups. Phasics’ expert software outputs in real time the optical path difference (OPD) map that can be directly transposed into surface topography. The Phasics solution for surface measurement stands out for its compactness and ease of integration. Indeed, SID4 wavefront sensors are as compact and as simple to integrate as a classical scientific camera. The integration can be performed directly on a production line or in a metrology laboratory.
▽ Measurement setup for surface qualification
The surface under test is imaged onto the SID4 quantitative phase imaging camera. The SID4 can be directly integrated on a commercial reflective microscope or on a dedicated in-line optical system. As the Phasics SID4 relies on QWLSI, an achromatic wavefront measurement technology, white light and LED sources are well-suited. Moreover, the measurement can be performed with any microscope objectives and is not polarization dependent.
▽ SID4 – AFM measurement comparison
Comparison of surface defects measured with scanning AFM and single-shot measurement with SID4 quantitative phase imaging camera.
▽SID4 – Optical profiler measurement comparison
Comparison of depth measurements obtained with the SID4 HR quantitative phase imaging camera and a white light optical surface profiler. Two profiles are reported, the first one with an emphasis on the rims and the other one on the depth measurement.
Measurement Outputs
Surface topography
Waviness
Roughness