Phasics SID4 UV HR (ultra-violet high resolution) wavefront sensor Based on Phasics’ patented technology, the SID4 UV HR wavefront sensor offers both an unrivalled high resolution (355 x 280 measurement points) and a very high sensitivity (1 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers…).
| Model | SID4 UV-HR |
|---|---|
| Wavelength range | 190 – 400 nm |
| Aperture dimension | 13.84 x 10.88 mm² |
| Spatial resolution | 38.88 µm |
| Phase & intensity sampling | 355 x 280 |
| Resolution (Phase) | 1 nm RMS |
| Accuracy (Absolute) | 10 nm RMS |
| Acquisition rate | 30 fps |
| Real-time processing frequency* | 3 fps (full resolution)* |
| Computer connection | Camera Link |
| Dimensions (w x h x l) | 78 x 88.1 x 70.8 mm³ |
| Weight | ~575g |
