SID4 UV


Spectral Range UV (190 – 400 nm)

Bringing high-resolution wavefront sensing as low as 250 nm, the SID4 UV is perfectly suited for UV optics testing, UV laser characterization (used in lithography or semiconductor applications), and surface inspection of lenses and wafers.

Key Features

  • Very high resolution – 250 × 250 sampling
  • High sensitivity – 2 nm RMS
  • Affordable solution for UV wavefront measurement

PHASICS

Spec

SID4 UV
ModelSID4 UV
Wavelength range250 – 400 nm
Aperture dimension7.4 x 7.4 mm²
Spatial resolution29.6 μm
Phase & intensity sampling250 x 250
Resolution (Phase)2 nm RMS
Accuracy (absolute)10 nm RMS
Acquisition rate> 30 fps
Real-time processing frequency*2 fps (full resolution)*
Computer connexionGiga Ethernet
Dimensions (W x H x L)45 x 30 x 100 mm³
Weight~250 g
*with SID4 Software
Download
Brochure-Optical-metrology-solutions-Kaleo-products-V9.pdf
Brochure-Laser-testing-and-adaptive-optics-solutions-V10.pdf
SID4-UV-Specifications-Sheet-V2.pdf