SID4 UV-HR
Spectral Range UV (190 – 400 nm)
Phasics SID4 UV HR (ultra-violet high resolution) wavefront sensor Based on Phasics’ patented technology, the SID4 UV HR wavefront sensor offers both an unrivalled high resolution (355 x 280 measurement points) and a very high sensitivity (1 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers…).
Key Features
- Sensitive down to 190 nm
- High sensitivity – 1 nm RMS
- Very high resolution (355 x 280 sampling)
PHASICS